Meet Our Team – Resin Green

Dr. Panagiotis Argitis

Director of Research at INN-NCSR Demokritos.

Institute of Nanoscience and Nanotechnology - NCSR "Demokritos"

Panagiotis Argitis is currently Director of Research at INN-NCSR Demokritos. He received his B.S. in Chemistry from the University of Athens in 1981 and his Ph.D. in Photochemistry/Photocatalysis from the same University in 1987. In the period 1988-1991 was a Post-Doctoral Researcher in the Department of Chem. Engineering of the Univ. of Texas at Austin and in 1991-92 had a teaching position in Univ. of Crete. In 1992 joined the Inst. of Microelectronics (now part of INN) of NCSR Demokritos. His research interests include new materials and processes for nanodevices/microsystems and organic electronics with emphasis on nanolithography, resists, EUV lithography, radiation guided nanopatterning, OLEDs, OPVs and sensing devices. Google Scholar: http://scholar.google.gr/citations?user=zAw1PK0AAAAJ&hl=el Research Gate: https://www.researchgate.net/profile/Panagiotis-Argitis Linkedin : https://www.linkedin.com/in/panagiotis-argitis-31912a58/

Dr. Ioannis Raptis

Researcher at NCSR - Demokritos

Institute of Nanoscience and Nanotechnology - NCSR "Demokritos"

Ioannis Raptis, received his BS degree in Physics (1989) and his Ph.D. in nanopatterning (1996) both from the Physics Department, University of Athens. The software part of his thesis on electron beam lithography simulation became a commercial product launched into the market by Sigma-C GmbH, Germany. Since 2003, he works at NCSR- Demokritos as researcher, and since 2013 as a Director of Research. His current research interests are on the design and implementation of technologies and electronic/photonic devices with critical dimension in the micro/nano-scale for a broad-range of bio/chemical sensing applications. He is/was Key Researcher and Coordinator of several EU (FP6, FP7, H2020) and national funded research projects with accumulated funding for NCSR ‘Demokritos >2.5M€. He is author of more than 180 publications in peer-reviewed international journals, and holder of 4 patents. He serves as Receiving Editor for JOLT (Elsevier) and as Ass. Editor for IEEE Sensors (IEEE).

Dr. Maria Vasilopoulou

Senior Researcher at the Institute of Nanoscience and Nanotechnology of NCSRD

Institute of Nanoscience and Nanotechnology - NCSR "Demokritos"

Dr. Maria Vasilopoulou received her degree in Physics from the University of Athens and her PhD in Functional Materials for Nanolithography from the Chemical Engineering Department of the National Technical University of Athens. Then she worked, as a postdoctoral researcher, at the National Center for Scientific Research Demokritos (NCSRD) where she developed organic and inorganic materials for application as interfacial layers in organic solar cells and light emitting diodes. She is currently a senior Researcher at the Institute of Nanoscience and Nanotechnology of NCSRD. Her research activity focuses on the area of the organic and halide perovskite optoelectronic devices.

Dr. George Papageorgiou

Scientist / Nanotechnology and Microsystems Laboratory (NML)

Institute of Nanoscience and Nanotechnology - NCSR "Demokritos"

Dr. Papageorgiou holds a PhD in Physics and as of 2014, works at the clean room (NML) of Institute of Nanoscience and Nanotechnology. He is responsible for the operation of the electron-beam lithography (EBL) tool and point of contact for EBL applications, profilometry and SEM characterisation. In addition to clean room process development services he also develops e-beam resist contrast data analysis and modelling software. He holds 15 publications with 240 citations (h-index:5).

Dr. Angeliki Sofia Foscolos

Research Associate

Institute of Nanoscience and Nanotechnology - NCSR "Demokritos"

Dr. Angeliki Sofia Foscolos is a Postdoctoral Researcher at the Laboratory of Natural Products Synthesis & Bioorganic Chemistry at the Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”. Her research primarily involves the total synthesis of bioactive natural products and their analogues, the development of organic compounds for biological applications, and drug development for therapeutic interventions. Additionally, she is engaged in the synthesis of organic compounds used as photoacid generators (PAGs) and etch resistance enhancers in nanolithography.

Dr. Anastasia Soultati

Research Associate

Institute of Nanoscience and Nanotechnology - NCSR "Demokritos"

Dr. Anastasia Soultati currently works as a postdoctoral researcher on materials for nanolithography and organic/perovskite optoelectronic devices at the National Center of Scientific Research “Demokritos” (NCSR D) in Athens, Greece.

Dr. Antonios M. Douvas

Researcher C'

Institute of Nanoscience and Nanotechnology - NCSR "Demokritos"

Antonios M. Douvas received his Diploma in Chemical Engineering in 1995 and PhD Diploma in Photolithography-Photocatalysis in 2003 from the Department of Chemical Engineering of National Technical University of Athens. He works as Researcher C’ at the Institute of Nanoscience and Nanotechnology of NCSR “Demokritos” since 2017. He has 65 publications in international scientific journals and conference proceedings (with 1694 citations, h-index 22), and 3 patents. His research interests include the development of lithographic materials, nanostructured hybrid materials and metal oxides/polyoxometallates for applications in micro-nanoelectronic and photocatalytic devices. He participates in WPs 2, 3, 5 of RESIN GREEN project.

Dr. Veroniki P Vidali

Senior Researcher

Institute of Nanoscience and Nanotechnology - NCSR "Demokritos"

Dr Veroniki P. Vidali is a Senior Researcher (Synthetic Organic Chemist) in the Natural Products Synthesis and Bioorganic Chemistry Laboratory at the Institute of Nanoscience & Nanotechnology, NCSR ""Demokritos"". In the Resin Green project, she is responsible for the design and synthesis of organic compounds used as photoacid generators (PAGs) and etch resistance enhancers in nanolithography for WP2 and for providing assistance in WP3. Her duties include designing compounds and their synthetic routes, supervising and participating in the execution of experimental procedures, and assisting in the design of compound evaluation experiments (WP2).

Dr. Vassilios Constantoudis

co-founder / Product Development Director

Nanometrisis

Dr. Constantoudis holds a PhD in Physics and has worked in the Institute of Nanoscience and Nanotechnology of NCSR Demorkitos. His research focuses in mathematical and computational problems in nanometrology with emphasis on the characterization and modelling of nanostructures found in electronic/photonic devices, smart surfaces, and biomaterial surfaces. He is also interested in process modeling of integrated circuits. His research results have been presented in more than 90 papers published in international referred journals receiving over 1200 references (h-index = 19). He recently engaged in the commercial exploitation of some of his research results, namely developing a nanometrology software. His role in the program involves the developement of the nanometrology codes and algorithms that will be used for the characterization and valuation of the developed structures. He is also supervising the dissemination activities of workpackage 6. https://www.researchgate.net/profile/Vassilios-Constantoudis https://demokritos.academia.edu/VassilisConstantoudis

Dr. George Papavieros

Product Development / Legal Representative/ Managing Director

Nanometrisis

Dr. Papavieros holds a PhD in Physics from the Aristotle University of Thessaloniki, an MS in Applied physics from New Jersey Institute of Technology (NJIT) and a Bachelor in Physics from the National and Kapodistrian University of Athens. His research experience focused on optical networks, microelectronics, MEMS, material science and device simulation and has worked as a researcher in the development and simulation of a MEMS based infrared sensor at NJIT. His current work and research is on nanometrology ( Plasma Group of the Institute of Nanoscience and Nanotechnology of NCSR Demokritos) and the Research and Development of the metrology software of Nanometrisis. He is also the COO of Nanometrisis P.C and Nanoplasmas P.C. His role in the program involves the developement of the nanometrology codes and algorithms that will be used for the characterization and valuation of the performance of the developed structures. Also he is supervising and participating in the dissemination activities of workpackage 6. https://www.researchgate.net/profile/George-Papavieros https://demokrios.academia.edu/GeorgePapavieros

Dr. Jean-Louis Leclercq

CNRS Scientist/Main contact Person

Centre national de la recherche scientifique - CNRS

Jean-Louis Leclercq joined the French CNRS as permanent Researcher in 1990. From 1990 to 1992, he worked by developing GaSb-based laser diodes. In 1992, he joined the Lyon Institute of Nanotechnology where he built up and managed the Nanolyon technology center (total area of 2100m² with 800 m² class 10 000 to class 100 cleanroom facilities) leading micro-nanotechnologies and optical microsystems developments. His current interests include heterogeneous integration, optoelectronics, micromachining and micro-nanofabrication related to III-V and Si-based materials for new photonic systems. More recently he is developing new emerging technologies as green bioresists for lithography, paper-based soft sensors, biomimetic micropatterning. In Resin Green he is involved in WP2 (leader) and WP3 technological activities (e-beam - EUV/DUV/UV biosourced resists).

Dr. Yann Chevolot

CNRS Scientist

Centre national de la recherche scientifique - CNRS

Yann Chevolot received the PhD degree in material science from the Federal Institute of Technology in Lausanne (EPFL, Lausanne, Switzerland) in 1999. Between 1999 and 2001, he worked as assistant of Pr Mathieu at EPFL. From 2001 to 2004, he worked in the research department of Goemar SA, Saint Malo (France). In 2004, he joined the CNRS at the Lyon Institute of Nanotechnology (UMR 5270) as a senior scientist and is research director since 2014. His research interest focuses on nanotechnology and carbohydrates. More recently, he has developped a new research activity on biosourced resists for lithography. He is co-author of more than 120 publications, 6 patents, 6 invited chapters. He is currently in charge of the Devices for Health and Environement (21 permanent staff). He has coordinated the ANR project Lithogreen on the development of green resist. He was awarded with Dr. Laurenceau, Dr. Leclercq and Pr. Delair by the price « Trophée de la Recherche Publique Energie-Environnement-Climat 2015» for the work on the development of a greenresist.

Dr. Olivier Soppera

CNRS scientist

Centre national de la recherche scientifique - CNRS

Dr. Olivier Soppera is CNRS Research Director (DR1) at the Institute of Materials Science of Mulhouse (CNRS UMR 7361, Université de Haute-Alsace). He leads a research team at IS2M in the field of the development of micro and nanostructuring processes of functional materials by photochemical methods. This approach consists in using light to build and shape matter, in 2D/3D, by integrating functional materials. The approach is multi-scale (from single molecule reactions in near-field photochemistry to the fabrication of macroscopic objects in 3D printing), multi-material (polymer, hybrid, inorganic sol-gel, metallic nanoparticles). This research topic is by essence strongly interdisciplinary between (photo)chemistry, physical chemistry and physics (optics, photonics, electronics) and corresponds to an original positioning in growing field of light-matter interaction. He (co)authored 151 publications in international journals, gave 122 talks in conferences (25 invited talks) and hold 7 patents. He received the CNRS Bronze medal in 2009. He is involved mainly in WP2.

Pr. Didier Leonard

UCBL scientist

Centre national de la recherche scientifique - CNRS

Dr. Didier LEONARD is Full Professor Exceptional Class Level 1 at Université Claude Bernard Lyon 1 and is Head of the Surfaces research group in the SMART research axis of the Institute of Analytical Sciences (UMR 5280 CNRS-UCBL) in Lyon (France). Since his PhD work completed in 1996, he has been leading reasearch projects involving use of top-surface analysis techniques (spectroscopy and microscopy) and especially the ToF-SIMS technique (more than 30 years expertise), with over 90 publications in the field. In the Resin Green Project, as in the former French ANR project Lithogreen, Pr. Didier LEONARD will be mostly involved in surface characterization and more especially ToF-SIMS in WP2 and 3.

Dr. Stéphane Trombotto

UCBL scientist

Centre national de la recherche scientifique - CNRS

Dr. Stéphane Trombotto is Associate Professor of chemistry at the University of Lyon (France) and researcher at the Polymer Materials Engineering Laboratory (IMP, UMR CNRS 5223). His research activities focus on the chemical synthesis and the physicochemical analyses of well-defined oligo- and polysaccharide materials (mainly chitosan and chitin), for applications in wide range of fields from microelectronics to biomedicine. He is a member of the European Chitin Society and has co-authored 60 scientific articles in international peered-reviewed journals (H-index 19) and 6 patents in the field of carbohydrate materials. In the Resin Green project, he is involved in the synthesis and characterization of polysaccharide materials (chitosans, alginates) used in the formulation of bio-sourced photosensitive resins (WP2 and WP3).

Kylian Virieux

CNRS scientist

Centre national de la recherche scientifique - CNRS

Kylian Virieux, MSc in Chemistry, is CNRS engineer at the Polymer Materials Engineering Laboratory (IMP, UMR CNRS 5223). In the Resin Green project, he is involved in the synthesis and characterization of polysaccharide materials (chitosans, alginates) for the preparation of bio-sourced photosensitive resins (WP2 and WP3).

Dr. Theodoros Manouras

Research Associate

University of Crete - UoC

Dr. Theodoros Manouras received his B.Sc in Materials Science from the University of Patras (Greece) in 2005 and his M.Sc. and PhD in Polymer Science from the University of Athens (Greece) in 2007 and 2012, respectively. He was a PhD scholar and Post-doc researcher in the National Center of Scientific Research “Demokritos” (Greece) working under the supervision of Dr. P. Argitis on the development of novel polymeric materials for lithographic applications and bioapplications. He is currently a research associate at University of Crete and IESL-FORTH (Heraklion-Greece) where he expanded his research interests to include synthesis of well-defined polymeric materials for antimicrobial applications, photodegradable biomaterials, drug delivery using smart polymers and lithographic applications using block copolymers and thermo/acid degradable polymers.

Prof. Maria Vamvakaki

Professor

University of Crete - UoC

Prof. Maria Vamvakaki is a Professor and the Chair of the Department of Materials Science and Engineering of the University of Crete and an affiliated Faculty Member at the Institute of Electronic Structure and Laser of the Foundation for Research and Technology – Hellas. She holds a doctoral degree in Polymer Chemistry from the University of Sussex, UK. Prof. Vamvakaki is leading the Materials Synthesis Group at the Department of Materials Science and Engineering of the University of Crete, which has extensive expertise on the synthesis and characterization of stimuli-responsive polymers, organic/inorganic hybrid materials, polyelectrolytes/polyampholytes, microgels/hydrogels and polymers on surfaces. Prof. Vamvakaki carries important expertise in participating and coordinating European Community research projects in the FP6, FP7, H2020, Horizon Europe and in national research projects. She has coordinated 11 projects, was the PI of 12 projects and the co-PI of 16 projects. The total University of Crete - IESL budget of these projects was ~ 8 million Euro. Prof. M. Vamvakaki has a total of 134 publications (being the corresponding author in a large number of them), 7 invited book chapters, 6482 total citations and 6176 non-self-citations, h-index 47 (source: Web of Science, 07/06/2024) (8940 citations, h-index 55 (source: Google Scholar, 07/06/2024)). Her current research interests include the synthesis of functional and stimuli-responsive polymeric materials and the self-assembly of macromolecules in aqueous media and on a surface.

Dr. Gaoliang Dai

Head of the working group "3D Nanometrology"

Physikalisch-Technische Bundesanstalt - PTB

"Dr. Gaoliang Dai is currently a research scientist and head of the working group “3D nanometrology” at the Physikalisch-Technische Bundesanstalt (PTB) – the national metrology institute of Germany. His research interests including the dimensional nanometrology, surface metrology, interferometry, nanopositioning, AFM and TEM techniques. He has received research fundings from EMPIR, ECSEL JU, ENIAC JU, TransMeT and industry in over ten projects. He has authored more than 100 papers in peer reviewed highly ranked journals, received five “best paper” and “outstanding paper” awards, as well as offered a number of keynote and invited presentations in international conferences. Gaoliang is involved in the project: (i) leading the activities of PTB; (ii) participating the developments of advanced metrology instrumetns; (iii) participating the measurements of samples delivered by partners; (iv) participating the data evaluation; and (v) reporting."

Dr. Christian Kuhlmann

Scientist

Physikalisch-Technische Bundesanstalt - PTB

Christian Kuhlmann holds a Ph.D. in electrical engineering and specializes in electronics design, instrument control and FPGA designs. He currently works at PTB on AFM controller interfaces with commercial motion controllers to enable highly performant operation of a metrological AFM.

Mr. Jan Thiesler, M.Sc.

PhD Student

Physikalisch-Technische Bundesanstalt - PTB

Jan is involved in the project in developing advanced metrology instruments.

Mr. Kai Hahm

Engineer

Physikalisch-Technische Bundesanstalt - PTB

Kai is involved in the project in measurements of samples delivered by partners.

Dr. Min Xu

Scientist

Physikalisch-Technische Bundesanstalt - PTB

Dr. Min Xu is a research scientist at the Physikalisch-Technische Bundesanstalt (Germany). She holds a PhD inPrecisionn Engineering from Tsinghua University, China. Her research focuses on dimensional metrology, surface characterization and AFM technology.

Dr. Benedicte Mortini

Engineer, Senior member of Technical staff

STMicroelectronics

Benedicte Mortini holds a Ph.D. from Université Joseph Fourier, Grenoble university in 2001 on the study of 193nm chemically amplified photoresists and their processes. She joined STMicroelectronics to start the first 193nm lithography cell in the company and then works over the years on various types of lithography : i-line, DUV 248nm, 193nm, 193nm immersion, as well as permanent layers like for image sensors, buffer layers...

Dr. Dimitrios Kazazis

Scientist/Laboratory for X-ray Nanoscience and Technology

Paul Scherrer Institut - PSI

He holds a PhD and an ScM from the School of engineering, Brown University, Providence, RI, USA, while he graduated with a diploma (5-yr program) from the School of Electrical and Computer Engineering, National Technical University of Athens, Greece. He is responsible for the EUV lithography activities at PSI, including the development of instrumentation for sub-10 nm resolution and the EUV resist evaluation projects. His current research lies in the field of nanoscience and nanotechnology, EUV lithography, resistless patterning, developing advanced nanofabrication techniques for two and three-dimensional structures and devices with applications in plasmonics, microfluidics, nanoelectronics, and EUV optics.

Dr. Yasin Ekinci

Head/Laboratory for X-ray Nanoscience and Technology

Paul Scherrer Institut - PSI

He holds a PhD from the Max-Plack Institute for Dynamics and Self-Organization, Göttingen, Germany, and MSc in Engineering Sciences at the University of De Montfort, Leicester, UK, and a bachelor’s degree in physics from the Middle East Technical University, Ankara, Turkey. His research experience encompasses diverse areas of nanoscience and technology, including atom optics, surface science, EUV lithography, resist materials, coherent scattering, lensless imaging, plasmonics, semiconductor nanostructures, biosensors, and nanofluidics. He is author/co-author of over 260 papers, 5 book chapters, and 10 patent applications. His role in the project will be in the EUV evaluation and characterization of the photoresists.

Dr. Isabelle Servin

Senior researcher

French Alternative Energies and Atomic Energy Commission - CEA

Isabelle SERVIN is a research scientist at CEA-Leti, Grenoble (France). She has 20 years of experience in the development of lithography processes for microelectronics, both in industry and R&D. Since 2022, she is involved in the eco-innovation program, as sustainability advisor for Technological Silicon Platform. She received her PhD on polymer chemistry from University Pierre & Marie Curie (Paris, France) in 1998.

Dr. Raphaël Feougier

Research engineer

French Alternative Energies and Atomic Energy Commission - CEA